Sapphire Capacitance Diaphragm Gauges / Sapphire Capacitance Diaphragm Gauge Models V8C/V8S (Copy)

Model V8 Sapphire Capacitance Diaphragm Gauge

The Azbil Sapphire Capacitance Diaphragm Gauge Model V8 is equipped with a sensor manufactured using MEMS processing technology, achieving higher resistance to deposition and shorter process downtime. With MEMS processing technology, the zero point shift has been reduced to one-tenth that of our conventional products. The Model V8 has a high-speed response time as fast as 1 ms.

A crystal sapphire pressure-sensing element offers excellent corrosion resistance, the ability to withstand high temperatures, and excellent mechanical characteristics. The Model V8S can be used at temperatures as high as 250 °C (482 °F) because its circuit boards and sensor are separated and special materials are used.

Shop Model V8

Designed for deposition resistance

In semiconductor manufacturing, by-products that deposit on the pressure-sensing diaphragm shift the zero point, which can lead to recalibration and costly equipment downtime. The Model V8C/V8S takes three countermeasures against deposition-caused zero-point drift: reduce deposition, minimize drift, and improve process repeatability.

Concept image of the alumina-coated sensor surface

01 / Reduce deposition

Alumina-coated diaphragm

An alumina coating on the diaphragm suppresses the adhesion of deposits.

Deposition simulation of four concentrically arranged pressure inletsConcept image of gas traveling along the baffle walls

02 / Minimize drift

Four pressure inlets and baffle structure

A flow pass structure with four concentrically arranged pressure inlets suppresses deflection-induced changes. The baffle structure increases collisions of active chemical species with the walls, promoting their deactivation before they reach the sensor.

Fine hexagonal trench pattern on the diaphragm surface

03 / Improve process repeatability

Fine trenches on the diaphragm

Fine trenches formed on the diaphragm surface divide the deposited film into small sections, reducing the stress effects of deposition.

Features

Stress-balanced structure of the Model V8 sensor

Stress-balanced structure

The zero point shift is reduced by thickening the periphery of the pressure-sensing part to offset the stress applied to the rim and the central region, making the pressure-sensing part unlikely to deform.

Uneven sensor chip surface of the Model V8

Uneven sensor chip surface

MEMS technology makes the surface uneven, breaking up film deposited on the sensor diaphragm and reducing the stress that deposition causes, dramatically reducing the zero point shift.

Compact Model V8C integrated gauge

Compact design

The Models V8C/V8S offer a smaller footprint. By arranging components more efficiently inside the product, volume has been reduced by 40% compared to our conventional products.

Choose your configuration

Select the right model for your installation space and temperature requirements, in addition to deposition resistance.

Sapphire Capacitance Diaphragm Gauge Model V8C, integrated model

Model V8C

Integrated model

  • Compact size: 40% less volume than our previous products
  • Flexible installation: Mount vertically or horizontally
  • User-set self-heating temperature: Adjustable from 45 to 200 °C
  • High-speed response: As fast as 1 ms
Order Model V8C Online
Sapphire Capacitance Diaphragm Gauge Model V8S, remote model

Model V8S

Remote model

  • Temperature compensation: The gauge head measures temperature and compensates for accuracy fluctuations
  • High-speed response: As fast as 1 ms
  • High-temperature operation: Up to 250 °C (482 °F)
Order Model V8S Online