Collection: Sapphire Capacitance Diaphragm Gauges

Stable vacuum measurement for deposition and etching processes

Azbil Sapphire Capacitance Diaphragm Gauges are high-efficiency, high-quality, easy-to-use vacuum gauges developed with the latest technologies.

Front-end film deposition and etching processes use a variety of gases that can leave film deposits on a vacuum gauge's sensor diaphragm. Those deposits shift the gauge's zero point, forcing operators to adjust the gauge more often and slowing down the manufacturing process.

Azbil's sapphire capacitance diaphragm gauges were designed to reduce zero point shift, helping keep film deposition and etching equipment running with fewer interruptions. Choose from the SPG5A standard and SPG6A extra high-temperature models for pressure or vacuum measurement, or the V8C/V8S models.