Semiconductor wafer manufacturing
Industry

Semiconductor

Components and Instrumentation for the Semiconductor Industry

Model F7M micro flow rate liquid flowmeter

Components and Instrumentation for the Semiconductor Industry

Azbil North America offers components and instrumentation for the Semiconductor Industry across the US, Canada, and Mexico to help our customers address the challenges of improving yield and reliability, enhancing productivity, decreasing process downtime, and preventive maintenance.

These include Wet Process Fiber Optic Photoelectric Sensors and Fiber Units, Micro Flow Liquid Flowmeters, Network Instrumentation Communication Modules, Gas Pressure Switches, Digital Mass Flow Controllers, and more for OEMs and manufacturers.

ALD, CMP, CVD, ETCH, PVD, and wet process are just some applications where our products add value. Reliable control and monitoring devices are critical to semiconductor processing, and we are here to help you select the right equipment for your unique needs.

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Our headquarters in Phoenix, AZ, includes a fulfillment center for fast delivery. Place your order safely and securely at www.orderazbil.com.

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Model F4Q Mass Flow Controller 1 / 4

Wet Process Fiber Optic Photelectric Sensors and Fiber Units

HPQ-D liquid leak detector

Model HPQ- D_ Liquid Leak Detector with Built-in Amplifier

Requires no absorbent paper. The optical method directly detects leaks. The detectors are usable with various liquids – Acids or alkaline liquids, IPA (Isopropyl alcohol), pure water, Fluorinert™, Galden™, etc. Detection performance does not depend on the conductivity of the target liquid.

HPQ-T pipe mount liquid level switch

Model HPQ-T_ Pipe Mount Liquid Level Switches with Built-in Amplifier

Can easily detect the surface of a liquid. The same model can be used for upper or lower limit detection.

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Micro Flow Liquid Flow Meters

Model F7M micro flow liquid flow meter

Model F7M Micro Flow Liquid Flow Meters

Monitor low flow liquid flow rates under 50 mL/min: measurement flow range 0.1 to 10 mL/min, 0.3 to 30 mL/min, or 0.5 to 50 mL/min depending on the model. These can also be integrated into your equipment or used in small tubing or piping.

Model F7M micro flow liquid flow meter starter kit

Model F7M_-KIT Micro Flow Liquid Flow Meter Starter Kits

Contain a flowmeter, fittings, accessories, and loader program to go straight from unpacking to bench testing or immediate usage in your application.

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Sapphire Capacitance Diaphragm Gauge

Model SPG5A/SPG6A sapphire capacitance diaphragm gauge

Model SPG5A/SPG6A Sapphire Capacitance Diaphragm Gauge (Pressure or Vacuum)

Use a sapphire capacitance pressure sensor to achieve high accuracy and reliability and are built to keep zero shift. Extreme High Temperature models available.

Model V8C sapphire capacitance diaphragm gauge

Model V8C Sapphire Capacitance Diaphragm Gauge (Independent)

Is ideal for accurate and stable absolute pressure measurement, especially in deposition processes like CVD. Newly developed sensors and baffles can be selected for the Model V8C, reducing deposits on the sapphire diaphragm. The V8C offers improvements in the amount of zero point shift, response time of 1ms and temperature correction over a wide range. Self heating temperatures can be set in a range of 45-200° C. and the V8C can be installed vertically or horizontally.

Model V8S sapphire capacitance diaphragm gauge

Model V8S Sapphire Capacitance Diaphragm Gauge (Separated Model)

Features a control unit separate from the gauge head, allowing it to handle temperatures as high as 250 °C often found in atomic layer deposition (ALD) equipment due to changes in the process gas. The gauge head measures the temperature and compensates for fluctuation in accuracy due to temperature variation. Using special components and its noise-reducing design, the model V8S achieves the same high-speed response time, as fast as 1 ms, as the integrated model.

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Fluorinert™ is a trademark of 3M. Galden™ is a trademark of SOLVAY SA.

Tech Library

Datasheets, brochures & guides

Sensors & Flow Meters

Pipe Mount Liquid Level Switches with Built-in Amplifier Model: HPQ-D_ Specification Pipe Mount Liquid Level Switches with Built-in Amplifier Model HPQ-T_ Specification Micro Flow Liquid Flow Meters Model: F7M Brochure Wet Process Sensors/Switches/Fibers/Flowmeter Selection Guide Sapphire Capacitance Diaphragm Gauge (Pressure or Vacuum) Model: SPG5A/SPG6A Specification

Controllers & Modules

Network Instrumentation Communication Module Model: NX-D_ _ Specification High/Low Gas Network Instrumentation Communication Multi-Loop Process Controller Model: C7G Specification High/Low Gas Network Instrumentation Communication Multi-Loop Process Controller Model: C7G Brochure Compact Digital Mass Flow Controller Model: F4Q Brochure Compact Digital Mass Flow Controller Model F4Q Specification
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