Gas Mass Flow Meters (Gas Flow Measurement and Control)

Model CMS Gas Mass Flow Meters for Hydrogen & Helium

Azbil Model CMS Gas Mass Flow Meters for Hydrogen and Helium Gases are equipped with Azbil Corporation’s µF (Micro Flow) sensor, which can detect even the slightest gas flow. The flow meters provide mass flow measurement of gas with a high-speed 2 ms response that is unaffected by changes in pressure and temperature.

The Model CMS incorporates a micro flow sensor built with silicon micromachining and thin-film technologies. The sensor is located on the pipe wall, and its symmetric structure measures reverse flow as well. Analog output can be switched between 0 to 5 V, 1 to 5 V, and 4 to 20 mA using the keys on the CMS body. An RS-485 option is available, as well as models with inspection results and a traceability certificate.

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Features

  • µF (Micro Flow) sensor
  • 2 ms high-speed response
  • Unaffected by pressure and temperature changes
  • Measures reverse flow
  • Key-selectable analog output
  • RS-485 option
  • Inspection results and traceability certificate models