Collection: Sapphire Capacitance Diaphragm Gauges / Sapphire Capacitance Diaphragm Gauge (Sapphire Capacitance Diaphragm Gauges)

Azbil Sapphire Capacitance Diaphragm Gauge Model V8 is equipped with a sensor manufactured using MEMS processing technology, achieving higher resistance to deposition and shorter process downtime. With MEMS processing technology, the zero point shift has been reduced to one-tenth that of our conventional products. The model V8 has a high-speed response time as fast as 1 ms.

A crystal sapphire pressure-sensing element offers excellent corrosion resistance, the ability to withstand high temperatures, and excellent mechanical characteristics. The Model V8S can be used in temperatures as high as 250 °C because its circuit boards and the sensor are separated, and special materials are used.

Stress-balanced structure

The zero-point shift is reduced by thickening the periphery of the pressure-sensing part to offset the stress applied to the rim and the central region, thereby making the pressure-sensing part unlikely to deform.

Uneven sensor chip surface
MEMEs technology makes the surface uneven, breaking up film deposited on the sensor diaphragm and reducing the stress that deposition causes, dramatically reducing the zero point shift.

The models V8C/V8S are compact offering a smaller footprint. By arranging components more efficiently inside the product, its volume has been reduced by 40% compared to our conventional products.